Nano Modification of Hard Coatings with Ions

  • Branko Skoric
  • Aleksandar Miletic
  • Pal Terek
  • Lazar Kovacevic
  • Milan Kukuruzovic


Abstract In this paper, we present the results of a study of TiN films which are deposited by a Physical Vapor Deposition and Ion Beam Assisted Deposition. In the present investigation the subsequent ion implantation was provided with N5+ ions. The ion implantation was applied to enhance the mechanical properties of surface. The film deposition process exerts a number of effects such as crystallographic orientation, morphology, topography, densification of the films. A variety of analytic techniques were used for characterization, such as scratch test, calo test, SEM, AFM, XRD and EDAX.

Dec 15, 2016
How to Cite
SKORIC, Branko et al. Nano Modification of Hard Coatings with Ions. International Journal of Research in Science(ISSN Online: 2412-4389), [S.l.], v. 2, n. 4, p. 1-5, dec. 2016. ISSN 2412-4389. Available at: <>. Date accessed: 21 sep. 2017.